Home > Dry Vacuum Pumps >

GRH3001 3000 M³/H dry type vacuum pump with Permanent Magnet Synchronous Motor

Product Categories

Rotary Vane Vacuum Pump [54]
Dry Scroll Vacuum Pump [7]
Dry Screw Vacuum Pump [12]
Roots Vacuum Pump [7]
Booster Vacuum Pump [25]
Vacuum Pump System [3]
Oil Mist Filter [5]
High Vacuum Valve [9]
Molecular Vacuum Pump [8]
Oil Free Rotary Vane Vacuum Pump [19]
Dry Vacuum Pumps [8]

SUZHOU KACO VACUUM EQUIPMENT CO.,LTD.

Trust Seal

Verified Supplier

Credit Check

Supplier Assessment

Contact Now

GRH3001 3000 M³/H dry type vacuum pump with Permanent Magnet Synchronous Motor

Pumping Speed : 3000 m³/h

Delivery Time : 15-30 working days

Cooling Water Temperature : 5-30 °C

Noise Level : ≤70 dB(A)

Control Interface : I/O and RS485 (Modbus Protocol)

Voltage : 380V Three-Phase

Weight : 770 kg

Certification : ISO 9001:2015, ISO 14001:2015, ISO 45001:2018

Cooling Water Flow : ≥11 L/min

Outlet Connection : KF40

Price : USD 18,000-25,000 / Set

Supply Ability : 500 Sets per Month

Dimensions (L×W×H) : 922×516×988 mm

Rated Power : 11+7.5 kW

N2 Purge Flow : 43-123 L/min

Sealing System : Lip Seal + Labyrinth Seal with N2 Purge

Brand Name : GRH

Motor Type : Permanent Magnet Synchronous Motor (PMSM)

Payment Terms : T/T, L/C, Western Union

Inlet Connection : ISO160

Packaging Details : Export-grade plywood case with vacuum-sealed moisture barrier and shock-proof foam insert

Model Number : GRH3001

Pump Type : Dry Vacuum Pump

MOQ : 1 Set

Place of Origin : China

Ultimate Pressure : ≤0.5 Pa

Contact Now

GRH3001 Dry Vacuum Pump

The GRH3001 is a 3000 m³/h dry vacuum pump built for medium-to-large scale semiconductor and photovoltaic manufacturing. It combines an oil-free pump chamber, compact design, and low energy consumption for reliable high-volume performance.

Key Features

Permanent Magnet Synchronous Motor — Delivers superior energy efficiency and lower power consumption compared to conventional induction motors.
Advanced Rotor Structure — Enhanced dust extraction capability, making the pump highly tolerant to particulate-laden process gases.
Dust and Water Vapor Tolerant — Insensitive to dust and water vapor entrained in the pumped gas stream.
Compact and Integrated Design — Small footprint with high system integration for easy installation in crowded fab environments.
Comprehensive Protection — Built-in protection functions with strong adaptive capability for varying process conditions.
Low Vibration and Noise — Operates at ≤70 dB(A) at ultimate pressure for a quieter workplace.
Advanced Sealing System — Lip seal and labyrinth seal combined with nitrogen purge effectively prevents oil back-streaming, ensuring high vacuum cleanliness in the process chamber.
Remote Control and Monitoring — Supports I/O interface and RS485 communication (Modbus protocol) for seamless integration into factory automation systems.

Technical Specifications

Parameter	Specification
Pumping Speed	3000 m³/h
Ultimate Pressure	≤0.5 Pa
Rated Power	11+7.5 kW
Voltage	380V Three-Phase
Cooling Water Pressure	0.2-0.6 MPa
Cooling Water Flow	≥11 L/min
Cooling Water Temperature	5-30 °C
Cooling Water Connection	G3/8
N2 Purge Pressure	0.2-0.6 MPa
N2 Purge Flow	43-123 L/min
N2 Purge Connection	G1/4
Inlet Connection	ISO160
Outlet Connection	KF40
Noise Level	≤70 dB(A)
Operating Environment	5~40°C; ≤80% RH
Weight	770 kg
Dimensions (LWH)	922516988 mm

Application Processes

Clean Processes

Load-Lock, Transfer, Metrology, Lithography

Medium Processes

PVD Process, PVD Pre-Clean, RTA, Strip/Ashing, Oxide Etch, Silicon Etch, Implant Source, Metal Etch

Harsh Processes

HDP-CVD, RTP, SACVD, MOCVD, PECVD, LPCVD, ALD

Target Industries

Semiconductor: Etching, ion implantation, CVD, and other clean, medium, and harsh process applications.
Photovoltaic: Crystal growth furnaces, cell manufacturing processes.
Lithium Battery: Cell vacuum drying, electrolyte filling, and degassing processes.
Flat Panel Display & LED: Manufacturing processes requiring high-cleanliness vacuum environments.

Product Tags:

Permanent Magnet Motor dry vacuum pump

3000 m³/h dry vacuum pump

Semiconductor PV dry vacuum pump

Buy cheap GRH3001 3000 M³/H dry type vacuum pump with Permanent Magnet Synchronous Motor product

GRH3001 3000 M³/H dry type vacuum pump with Permanent Magnet Synchronous Motor Images

Inquiry Cart 0

Send your message to this supplier


*From:	Your email address is incorrect!
*To:	SUZHOU KACO VACUUM EQUIPMENT CO.,LTD.
*Subject:	Subject is empty!
*Message:	For the best results, we recommend including the following details: -Self introduction -Required specifications -Inquire about price/MOQ Characters Remaining: (0/3000) Please enter 20 to 3000 characters to contact this supplier!