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GRH1202 1200 M³/H Dry Vacuum Pump For Semiconductor Photovoltaic

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GRH1202 1200 M³/H Dry Vacuum Pump For Semiconductor Photovoltaic

Place of Origin : China

Pumping Speed : 1200 m³/h

Cooling Water Flow : ≥4.7 L/min

Outlet Connection : KF40

Dimensions (L×W×H) : 821×420×791 mm

MOQ : 1 Set

Payment Terms : T/T, L/C, Western Union

Cooling Water Temperature : 5-30 °C

Noise Level : ≤70 dB(A)

Control Interface : I/O and RS485 (Modbus Protocol)

Voltage : 380V Three-Phase

Weight : 220 kg

Rated Power : 7.5+1.9 kW

N2 Purge Flow : 4-96 L/min

Sealing System : Lip Seal + Labyrinth Seal with N2 Purge

Certification : ISO 9001:2015, ISO 14001:2015, ISO 45001:2018

Price : USD 8,000-12,000 / Set

Packaging Details : Export-grade plywood case with vacuum-sealed moisture barrier and shock-proof foam insert

Motor Type : Permanent Magnet Synchronous Motor (PMSM)

Inlet Connection : ISO100

Supply Ability : 500 Sets per Month

Ultimate Pressure : ≤0.5 Pa

Brand Name : GRH

Model Number : GRH1202

Pump Type : Dry Vacuum Pump

Delivery Time : 15-30 working days

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GRH1202 Dry Vacuum Pump

The GRH1202 is a 1200 m³/h dry vacuum pump engineered for semiconductor, photovoltaic, and lithium battery manufacturing processes. It features a completely oil-free pump chamber, compact footprint, and low energy consumption, delivering reliable performance with low total cost of ownership.

Key Features

Permanent Magnet Synchronous Motor — Delivers superior energy efficiency and lower power consumption compared to conventional induction motors.
Advanced Rotor Structure — Enhanced dust extraction capability, making the pump highly tolerant to particulate-laden process gases.
Dust and Water Vapor Tolerant — Insensitive to dust and water vapor entrained in the pumped gas stream.
Compact and Integrated Design — Small footprint with high system integration for easy installation in crowded fab environments.
Comprehensive Protection — Built-in protection functions with strong adaptive capability for varying process conditions.
Low Vibration and Noise — Operates at ≤70 dB(A) at ultimate pressure for a quieter workplace.
Advanced Sealing System — Lip seal and labyrinth seal combined with nitrogen purge effectively prevents oil back-streaming, ensuring high vacuum cleanliness in the process chamber.
Remote Control and Monitoring — Supports I/O interface and RS485 communication (Modbus protocol) for seamless integration into factory automation systems.

Technical Specifications

Parameter	Specification
Pumping Speed	1200 m³/h
Ultimate Pressure	≤0.5 Pa
Rated Power	7.5+1.9 kW
Voltage	380V Three-Phase
Cooling Water Pressure	0.1-0.6 MPa
Cooling Water Flow	≥4.7 L/min
Cooling Water Temperature	5-30 °C
Cooling Water Connection	G3/8
N2 Purge Pressure	0.2-0.6 MPa
N2 Purge Flow	4-96 L/min
N2 Purge Connection	G1/4
Inlet Connection	ISO100
Outlet Connection	KF40
Noise Level	≤70 dB(A)
Operating Environment	5~40°C; ≤80% RH
Weight	220 kg
Dimensions (LWH)	821420791 mm

Application Processes

Clean Processes

Load-Lock, Transfer, Metrology, Lithography

Medium Processes

PVD Process, PVD Pre-Clean, RTA, Strip/Ashing, Oxide Etch, Silicon Etch, Implant Source, Metal Etch

Harsh Processes

HDP-CVD, RTP, SACVD, MOCVD, PECVD, LPCVD, ALD

Target Industries

Semiconductor: Etching, ion implantation, CVD, and other clean, medium, and harsh process applications.
Photovoltaic: Crystal growth furnaces, cell manufacturing processes.
Lithium Battery: Cell vacuum drying, electrolyte filling, and degassing processes.
Flat Panel Display & LED: Manufacturing processes requiring high-cleanliness vacuum environments.

Product Tags:

Semiconductor dry vacuum pump

1200 m³/h dry vacuum pump

Photovoltaic dry vacuum pump

GRH1202 1200 M³/H Dry Vacuum Pump For Semiconductor Photovoltaic Images

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